Bulgarian Journal of Physics

Bulgarian Journal of Physics

Print: 1310-0157 Online: 1314-2666

RECOGNIZED BY THE EUROPEAN PHYSICAL SOCIETY APPROVED BY THE EUROPEAN COMMISSION

Bulg. J. Phys. vol.21 no.1-2 (1994), pp. 087-095

Preparation of Hydrogenated Amorphous Silicon by Homogeneous Chemical Vapour Deposition

S. Koynov, A. Toneva
Central Laboratory of Solar Energy and New Energy Sources, Bulgarian Academy of Sciences, 72 Tzarigradsko Shose Blvd., 1784 Sofia, Bulgaria

Abstract. The paper presents a study on the kinetics of a Homogeneous CVD process for a-Si:H preparation. The growth rate of a-Si:H films {on substrates) versus SiH₄-gas temperature is investigated under various gas pressures. The rates of two by-way processes: a-Si film deposition (on the reactor walls) and the (SiH_x)_n powder formation (in the gas phase) are also investigated in dependence on gas temperature and ptessure. The correlations between all these dependencies are used to establish a set of the optimum gas phase conditions for high-quality a-Si:H film preparation at reasonable deposition rates.

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RECOGNIZED BY THE EUROPEAN PHYSICAL SOCIETY APPROVED BY THE EUROPEAN COMMISSION

2-8 July 2023 The International Workshop on Nuclear Theory (IWNT) is annually organized since 1980 by the Nuclear Theory Laboratory (NTL) of the Institute for Nuclear Research and Nuclear Energy of the Bulgarian Academy of Sciences. Proceedings of the Workshop will be published.

Bulg. J. Phys. vol.21 no.1-2 (1994), pp. 087-095

Preparation of Hydrogenated Amorphous Silicon by Homogeneous Chemical Vapour Deposition

Full-text: PDF

2-8 July 2023
The International Workshop on Nuclear Theory (IWNT) is annually organized since 1980 by the Nuclear Theory Laboratory (NTL) of the Institute for Nuclear Research and Nuclear Energy of the Bulgarian Academy of Sciences. Proceedings of the Workshop will be published.