Abstract. The influence of boats coated with low grain quartz crystallites on the concentration of residual impurities in indium arsenide growth was studied. The parameters of ingots obtained by two-temperature synthesis in sand blasted boats, BN coated boats and boats with surface crystallites have been compared. The results indicate that synthesis in boats with crystalline coating leads to residual impurities reduction —for instance the concentration of Si at the front and at the end of such boats are respectively 3.4×10¹⁵cm⁻³ and 2.1×10¹⁵cm⁻³, while for sand blasted boat they are 8.1×10¹⁵cm⁻³ and 2.7×10¹⁵cm⁻³. A model has been proposed, which relates the residual impurities not only to the type of the boat used but to the technological condition of the process.

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