Bulg. J. Phys. vol.29 no.1-2 (2002), pp. 82-90

Capacitance Matrix Calculation of Lossy Multilayer Interconnects Using Quasi-TEM Mode of Propagation and Fourier Series Approach

H. Ymeri1, B. Nauwelaers1, K. Maex2
1Division ESATTELEMIC, Department of Electrical Engineering, Katholieke Universiteit Leuven, Kasteelpark Arenberg 10, B-3001 Leuven-Heverlee, Belgium
2IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
Abstract. In this paper, we present a new approach for capacitance matrix calculation of lossy multilayer IC interconnects based on quasi-static analysis and Fourier projection technique. The formulation is independent from the position of the interconnect conductors and number of layers in the structure, and is especially adequate to model 2D and 3D layered structures with planar boundaries. Due to the quasi-static algorithms considered for the capacitance analysis and the expansions in terms of convergent Fourier series the tool is reliable and very efficient; results can be obtained with relatively little programming effort. The validity of the technique is verified by comparing its results with on-surface MEI method, moment method for total charges in the structure, and CAD-oriented equivalent-circuit methodology, respectively.

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