Bulg. J. Phys. vol.27 no.1 (2000), pp. 013-019

Nonlinear Effects in Inductive Discharges

V. Godyak
OSRAM SYLVANIA, 71 Cherry Hill Drive, Beverly. MA 01915. USA
Abstract. Nonlinear effects in an inductive discharge have been studied in a low pressure and low frequency operational regime. Discharge electrical characteristics and the spatial distribution of the rf electromagnetic fields and currents at fundamental and higher harmonics have been measured. It has been found that at this condition the Lorentz force in the discharge skin layer is much larger than electric force, and that gives rise to excitation of the second harmonic potential and deformation of the plasma density and ambipolar profile in the skin layer.

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