Bulgarian Journal of Physics

Bulgarian Journal of Physics

Print: 1310-0157 Online: 1314-2666

RECOGNIZED BY THE EUROPEAN PHYSICAL SOCIETY APPROVED BY THE EUROPEAN COMMISSION

Bulg. J. Phys. vol.26 no.1-2 (1999), pp. 065-070

Diffusion Barrier Properties of CVD Thin Tungsten and Tantalum Films Deposited on WC/Co Metalloceramics

K. Gesheva, D. Gogova, T. Ivanova
Central Laboratory for Solar Energy and New Energy Sources, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee Blvd., 1784 Sofia, Bulgaria

Abstract. Thin Tungsten (W) and Tantalum (Ta) films were deposited by pyrolysis from W(CO)₆, WCl₆ and TaCl₅ precursors on WC/Co metalloceramics substrates, containing 7–8% and 11–12% Co. Their properties to preventing a Co diffusion from the substrate to the surface coating have been studied by X-ray microprobe enalysis, Auger electron spectroscopy and Direct Layer by Layer Spectral Analyses in Hallow Cathode method.

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RECOGNIZED BY THE EUROPEAN PHYSICAL SOCIETY APPROVED BY THE EUROPEAN COMMISSION

2-8 July 2023 The International Workshop on Nuclear Theory (IWNT) is annually organized since 1980 by the Nuclear Theory Laboratory (NTL) of the Institute for Nuclear Research and Nuclear Energy of the Bulgarian Academy of Sciences. Proceedings of the Workshop will be published.

Bulg. J. Phys. vol.26 no.1-2 (1999), pp. 065-070

Diffusion Barrier Properties of CVD Thin Tungsten and Tantalum Films Deposited on WC/Co Metalloceramics

Full-text: PDF

2-8 July 2023
The International Workshop on Nuclear Theory (IWNT) is annually organized since 1980 by the Nuclear Theory Laboratory (NTL) of the Institute for Nuclear Research and Nuclear Energy of the Bulgarian Academy of Sciences. Proceedings of the Workshop will be published.