Bulg. J. Phys. vol.23 no.3-4 (1996), pp. 181-192


Automated Langmuir Probe Based System for Electron Energy Spectrum Measurements in a RF Glow Discharge

K. Bachev, E. Tatarova, E. Stoykova, N. Djermanova
Faculty of Physics, University of Sofia, 1164 Sofia, Bulgaria
Abstract. An experimental system specifically designed for probe measurement of the electron energy distribution function (EEDF) in a low-pressure RF discharge is described. A passive circuit connected to the probe when properly tuned increases the impedance between the probe and ground thereby forcing the probe to follow the instantaneous plasma potential. In this manner, the RF influ?ence on probe measurements is minimized. The obtained results for EEDFs are presented and discussed in the frame of the current knowledge of RF discharges.

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