Bulg. J. Phys. vol.22 no.1-2 (1995), pp. 044-059

A Technology for 2-Dimensional HTS Josephson Junctions Arrays

P. Martinoli1, B. Jeanneret1, V. Tsaneva2, T. Luthy1, D. Ariosa1, C. Leemann1, Ph. Lerch3, J. Burger4
1Institut de Physique, Universite de Neuchatel, rue Breguet I, Neuchatel 2000, Switzerland
2Inst. of Electronics, Bulgarian Academy of Sciences, 72 Tzarigradsko Shose, Sofia 1784, Bulgaria
3Paul Sherrer Institute, 5234 Villigen, Switzerland
4Centre of Electronics and Microtechnique S. A., Neuchatel 2000, Switzerland
Abstract. A technology for fabricating 2D JJA consisting of a periodic square network of high Tc superconducting nodes separated by identical step edge junc? tions is presented. It includes: (i) step formation by ion beam etching of the masked substrate; (ii) YBCO blanket film deposition by laser ablation; (iii) array formation by ion beam etching of the HTS film. Some technological peculiarities of the processes and their impact on film quality are discussed. The films and networks were studied by X-ray diffraction, 4-point and contact?less resistance temperature dependence measurements. Atomic Force Microscopy was used for sample characterization. The samples dynamic response to a small ac signal was studied by a two-coil inductance method. The observed oscillations in external magnetic field confirm the possibility to consider thus prepared samples as 2D JJA.

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