Bulg. J. Phys. vol.22 no.3-4 (1995), pp. 055-060

Ion Optics and Energy Analyzer for Liquid Metal Ion Sources

T. Tzvetkov, N. Drandarov, B. Nikolov
Institute of Electronics, Bulgarian Academy of Sciences, 72, Tsarigradsko Shose Blvd., 1784 Sofia, Bulgaria
Abstract. A five-electrode ion optical system and a cylindrical energy analyzer were developed. They allow the energy and mass distribution of ions emitted from liquid metal ion sources to be measured. The five-electrode immersion lens works in deceleration mode retarding the ions down to 80 eV. The energy analyzer was designed to have a torroidal electric field and can focus the ions in two perpendicular directions.

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