Bulg. J. Phys. vol.22 no.3-4 (1995), pp. 061-066

The Effect of Source Temperature on Angular Distributions of Ions Emitted by an InGa Liquid Alloy Ion Source

S. Georgieva, N. Drandarov, B. Nikolov
Institute of Electronics, Bulgarian Academy of Sciences, 72, Tsarigradsko Shose Blvd., 1784 Sofia, Bulgaria
Abstract. Angular distributions of the total ion current and those of different ion species emitted from InGa liquid alloy ion source have been measured. The dependence of angular distributions on source temperature and emission current are investigated. An anisotropy of ion beam composition as a function of angle is observed due to differences in angular distributions of Ga+ and In+ ions. The angular distribution of Ga+ has one peak but the angular distribution of In+ is composed of two peaks. When the temperature is increased, two peaks move closer one to another.

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