Abstract. Optical properties of ion-plated hydrogenated amorphous diamond-like carbon (DLC) films were investigated in wide range of negative bias voltage U_b to the substrate. The optical constants and associated functions were determined from reflectance and extinction data analysis obtained by Variable Angle Spectroscopic Ellipsometer. The strong dependence of the optical properties on the bias voltage, and in this way, on the hydrogenation of the films were confirmed. The absolute values of the optical constants, optical band gap and energy loss function of the carbon films are discussed in terms of the theoretical considerations for the amorphous semiconductors.

Full-text: PDF