Bulg. J. Phys. vol.20 no.1-2 (1993), pp. 069-075

Shape Measurement by Phase-Shifting Laser Interferometry

V. Sainov, G. Stoilov
Central Laboratory of Optical Storage and Processing of Information, Bulgarian Academy of Sciences, Sofia 1119, P.O. Box 95, Bulgaria
Abstract. A digital method for shape measurement of objects with arbitrary and diffuse-scattering surfaces is experimented. It is based on consecutive illumination with phase-shifted interference patterns and digital processing of light, reflected from the reference (etalons) and measured surface. The coordinates of the points are given by difference phasemap modulus π with high accuracy — the theoretical and experimental results obtained are in good agreement. The advantages in comparison with other methods are shown.

Full-text: PDF

go back