Bulg. J. Phys. vol.20 no.1-2 (1993), pp. 069-075
Shape Measurement by Phase-Shifting Laser Interferometry
V. Sainov, G. Stoilov
Central Laboratory of Optical Storage and Processing of Information, Bulgarian Academy of Sciences, Sofia 1119, P.O. Box 95, Bulgaria
go backCentral Laboratory of Optical Storage and Processing of Information, Bulgarian Academy of Sciences, Sofia 1119, P.O. Box 95, Bulgaria
Abstract. A digital method for shape measurement of objects with arbitrary and diffuse-scattering surfaces is experimented. It is based on consecutive illumination with phase-shifted interference patterns and digital processing of light, reflected from the reference (etalons) and measured surface. The coordinates of the points are given by difference phasemap modulus π with high accuracy — the theoretical and experimental results obtained are in good agreement. The advantages in comparison with other methods are shown.