Bulgarian Journal of Physics

Bulgarian Journal of Physics

Print: 1310-0157 Online: 1314-2666

RECOGNIZED BY THE EUROPEAN PHYSICAL SOCIETY APPROVED BY THE EUROPEAN COMMISSION

Bulg. J. Phys. vol.19 no.1-2 (1992), pp. 078-081

Rapid Thermal Annealing of CVD-Molybdenum Thin Films

K.A. Gesheva¹, V. Abrosimova²
¹Central Laboratory for Solar Eriergy and New Energy Sources, Bulgarian Academy of Sciences, 72, Tzarigradsko shose, Sofia 1784, Bulgaria
²Institute of Technological Problems in Microelectronics, 1424.32 Chernogolovka, Moskow area, Russian Federation

Abstract. Molybdenum thin films deposited in silicon by thermal decomposition of Mo(Co)₆ at atmospheric pressure have additionally undergone a rapid thermal annealing (RTA) in argon atmosphere. Their surface resistance and specific resistivity have been studied in dependence of the annealing temperature.

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RECOGNIZED BY THE EUROPEAN PHYSICAL SOCIETY APPROVED BY THE EUROPEAN COMMISSION

2-8 July 2023 The International Workshop on Nuclear Theory (IWNT) is annually organized since 1980 by the Nuclear Theory Laboratory (NTL) of the Institute for Nuclear Research and Nuclear Energy of the Bulgarian Academy of Sciences. Proceedings of the Workshop will be published.

Bulg. J. Phys. vol.19 no.1-2 (1992), pp. 078-081

Rapid Thermal Annealing of CVD-Molybdenum Thin Films

Full-text: PDF

2-8 July 2023
The International Workshop on Nuclear Theory (IWNT) is annually organized since 1980 by the Nuclear Theory Laboratory (NTL) of the Institute for Nuclear Research and Nuclear Energy of the Bulgarian Academy of Sciences. Proceedings of the Workshop will be published.