Bulgarian Journal of Physics

Bulgarian Journal of Physics

Print: 1310-0157 Online: 1314-2666

RECOGNIZED BY THE EUROPEAN PHYSICAL SOCIETY APPROVED BY THE EUROPEAN COMMISSION

Bulg. J. Phys. vol.28 no.3-4 (2001), pp. 147-152

Microhardness-depth Profiles of Si/SiC Layered Structures Prepared

E. Trifonova¹, T. Angelova¹, R. Yakimova², E. Jansen²
¹Faculty of Physics, St. Kliment Ohridski University of Sofia, 5 J. Bourchier Blvd, 1164 Sofia, Bulgaria
²Department of Physics and Measurement Technology, 1FM, Linkoping University, S-581 83 Linkoping, Sweden

Abstract. Microhardness-depth profiles of Si/SiC layered structures prepared by chemical vapour deposition are studied by indenting with the pyramids of Knoop and of Vickers. In this way it is possible to reveal strained regions resulting from the large lattice mismatch between Si and SiC.

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RECOGNIZED BY THE EUROPEAN PHYSICAL SOCIETY APPROVED BY THE EUROPEAN COMMISSION

2-8 July 2023 The International Workshop on Nuclear Theory (IWNT) is annually organized since 1980 by the Nuclear Theory Laboratory (NTL) of the Institute for Nuclear Research and Nuclear Energy of the Bulgarian Academy of Sciences. Proceedings of the Workshop will be published.

Bulg. J. Phys. vol.28 no.3-4 (2001), pp. 147-152

Microhardness-depth Profiles of Si/SiC Layered Structures Prepared

Full-text: PDF

2-8 July 2023
The International Workshop on Nuclear Theory (IWNT) is annually organized since 1980 by the Nuclear Theory Laboratory (NTL) of the Institute for Nuclear Research and Nuclear Energy of the Bulgarian Academy of Sciences. Proceedings of the Workshop will be published.