Bulg. J. Phys. vol.17 no.3 (1990), pp. 223-229


Laser Ellipsometric Methods for the Optical Analysis of Thin Films

I.Ohlídal
Faculty of Science, Department of Solid State Physics, Purkyně University, Kotlářská 2, 61137 Brno, Czechoslovakia
Abstract. Modern laser ellipsometric methods for analysing various multilayer systems are described in this paper. The basic features of the methods of multiple angle of incidence ellipsometry, combined refleclion and transmission ellipsometry and combined immersion and multiple angle of incidence ellipsometry are specified in detail together with examples of their use in the complete oplical analysis of chosen samples of different thin film systems.

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