Bulg. J. Phys. vol.16 no.3 (1989), pp. 280-285


RF Magnetron Deposition of High Tc Superconductors Y-Ba-Cu-O

Z. Ivanov, T. Donchev, B. Goranchev, T. Nurgaliev, B. Todorov
Institute of Electronics, Bulgarian Academy of Sciences, 1784 Sofia
Abstract. Y-Ba-Cu-O thin films were prepared by RF magnetron sputtering from unannealed targets, prepared by mixing and pressing the appropriate amounts of Y2O3, BaCO3 and CuO. Films became superconducting after standard annealing procedure. Critical temperature Tc = 78 K with ΔT = 5K was obtained. The films showed stable Tc within 90 days in ambient atmosphere. Energy dispersive X-ray microanalysis and Auger spectroscopy showed that film composition, excluding surface, was close to 1:2:3 target composition.
(in Russian)

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