Abstract. Plasma polymers and composites based on hexamethyldisiloxane (PPHMDSO) were synthesized and studied by FTIR. By varying plasma polymerization parameters, fillers with various nanodiamond particles (DNDs) and post ammonia plasma modification the changes in the structure were achieved. At higher current density an elongation of the polymer chain and high cross-linking were observed. The decrease of the monomer flow rate led to a long-chain and branched polysiloxane network. The structure of the composites contained DND particles distributed in the polymer matrix. The ammonia modification led to a higher degree of cross-linking due to the additional decrease of hydrocarbon groups. This work demonstrates the possibility to produce composites with controlled chemical structure by changing plasma parameters, DND nanofillers and post treatment in ammonia plasma.

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