Abstract. Computer-supported techniques are introduced in the evaluation of experimental data. Tikhonov's regularization fitting procedure for spectroscopic applications is applied for obtaining the real profile of spectral lines. Model functions are introduced to check applicability limitation of this method. The advantages from classical methods are shown. It is found that the regularization method enables to obtain unknown profile of a spectral line, knowing the estimate of errors of experimental data and apparatus function. Moreover, this method can be used for detecting the shift, asymmetry, and the presence of another line and distortion of a spectral line caused by the self-absorption. The procedures are applied to the measured profiles of Hell's spectral lines in a pulsed low-pressure arc. The chosen lines are Hell Pashen-alpha (468.6 nm) in visible region and Balmer-beta (121.5 nm) in VUV spectral region. It is found that we can obtain the real profile of Hell 468 .6 nm spectral line, when the estimate of error is less than 15% and less than 10% for Hell 121.5 nm, using regularization method.

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